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Featuring an ultra-thin and integrated design with a minimum body height of only 105mm, this unit is specifically optimized for embedding inside process equipment such as semiconductor tools, laser processing machinery, precision instruments, and automated assembly lines. It delivers clean air directly to the process chamber, drastically saving space for compact, modular machinery.
The inherent high efficiency of the EC motor leads to significant energy savings compared to traditional solutions. Operation is exceptionally smooth with minimal noise and vibration, providing a stable environment for high-precision equipment and preventing interference with sensitive sensors.
Equipped with a high-performance EC motor supporting 0-100% infinite variable speed control. It allows for precise closed-loop control of wind speed and pressure via IO signals or group control systems, tailored to specific process needs like etching, coating, or inspection.
The unit features standardized interfaces and flexible communication protocols, facilitating rapid integration for manufacturers. The modular design simplifies later maintenance or filter replacement, reducing downtime and costs.
| Item / Frame Size | 2×2 | 2×4 | 3×4 | 4×4 |
|---|---|---|---|---|
| FFU Size (mm) | 575×575×105 | 575×1175×105 | 875×1175×155 | 1175×1175×155 |
| Filter Size (mm) | 570×570×55/70 | 570×1170×55/70 | 870×1170×55/70 | 1170×1170×55/70 |
| Air Volume (CMH) | 455 | 990 | 1550 | 2100 |
| Noise Level (dB) | 49±2 | 51±2 | 52±2 | 53±2 |
| Power (W) | 55 | 90 | 150 | 190 |
| Efficiency | HEPA 0.3μm 99.995% / ULPA 0.12μm 99.9995% | |||
| Materials | Aluzinc Steel / Stainless Steel / Aluminum Alloy / Fiberglass / PTFE | |||
We focus on the research, development, and production of air purification equipment and advanced filtration solutions. Our products are widely utilized in semiconductors, liquid crystal panels, pharmaceuticals, medical health, precision processing, and the automotive industry. We offer customized air quality management solutions to meet the specific requirements of our global clients.
Equipped with advanced testing laboratories and research facilities, we maintain industry-leading production standards. Through international certifications like ISO9001, 14001, and 45001, we ensure high-quality products and professional support.
FLare Solar